AKT SC CMP (Chemical Mechanical Polishing) retaining rings are produced from the highest quality engineering plastics in the industry such as:
Ertalyte PET
Ketron PEEK
Techtron PPS.
Available in either full plastic configuration or bonded with SUS316.
Our CMP retaining rings are already used by leading chip manufacturers in all region and are proven to run on Applied Materials’ Mirra, Reflexion LK, Reflexion LK prime and Ebara’s FREX200/300.
At AKT SC we manufacture retaining rings with world-class precision to ensure consistency and reduce wafer to wafer non-uniformity during your CMP process.